{"id":20556,"date":"2023-06-27T15:49:44","date_gmt":"2023-06-27T07:49:44","guid":{"rendered":"https:\/\/www.jtcopper.com\/?p=20556"},"modified":"2023-06-27T15:49:44","modified_gmt":"2023-06-27T07:49:44","slug":"igbt-zhuan-lan-igbt-shi-sha","status":"publish","type":"post","link":"https:\/\/www.jtcopper.com\/hghy\/20556","title":{"rendered":"\u3010IGBT\u4e13\u680f\u3011IGBT\u662f\u5565\uff1f"},"content":{"rendered":"
\n
\n
\u5f53\u524d\u7684\u65b0\u80fd\u6e90\u8f66\u7684\u6a21\u5757\u7cfb\u7edf\u7531\u5f88\u591a\u90e8\u5206\u7ec4\u6210\uff0c\u5982\u7535\u6c60\u3001VCU\u3001BSM\u3001\u7535\u673a\u7b49\uff0c\u4f46\u662f\u8fd9\u4e9b\u90fd\u662f\u53d1\u5c55\u6bd4\u8f83\u6210\u719f\u7684\u4ea7\u54c1\uff0c\u56fd\u5185\u5916\u7684\u6a21\u5757\u5382\u5546\u5df2\u7ecf\u5f00\u53d1\u4e86\u5f88\u591a\uff0c\u4f46\u662f\u6709\u4e00\u4e2a\u6a21\u5757\u9700\u8981\u5f15\u8d77\u884c\u4e1a\u5185\u7684\u91cd\u89c6\uff0c\u90a3\u5c31\u662f\u7535\u673a\u9a71\u52a8\u90e8\u5206\uff0c\u5219\u662f\u7535\u673a\u9a71\u52a8\u90e8\u5206\u6700\u6838\u5fc3\u7684\u5143\u4ef6IGBT\uff08Insulated Gate Bipolar Transistor\u7edd\u7f18\u6805\u53cc\u6781\u578b\u6676\u4f53\u7ba1\u82af\u7247\uff09\u3002<\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

\"\"<\/strong><\/p>\n

\u7535\u7684\u53d1\u73b0\u662f\u4eba\u7c7b\u5386\u53f2\u7684\u9769\u547d\uff0c\u7531\u5b83\u4ea7\u751f\u7684\u52a8\u80fd\u6bcf\u5929\u90fd\u5728\u6e90\u6e90\u4e0d\u65ad\u7684\u91ca\u653e\uff0c\u4eba\u5bf9\u7535\u7684\u9700\u6c42\u4e0d\u4e9a\u4e8e\u4eba\u7c7b\u4e16\u754c\u7684\u6c27\u6c14\uff0c\u5982\u679c\u6ca1\u6709\u7535\uff0c\u4eba\u7c7b\u7684\u6587\u660e\u8fd8\u4f1a\u5728\u9ed1\u6697\u4e2d\u63a2\u7d22\u3002<\/strong><\/p>\n

\u7136\u800c\u5728\u7535\u529b\u7535\u5b50\u91cc\u9762\uff0c\u6700\u91cd\u8981\u7684\u4e00\u4e2a\u5143\u4ef6\u5c31\u662fIGBT\u3002\u6ca1\u6709IGBT\u5c31\u4e0d\u4f1a\u6709\u9ad8\u94c1\u7684\u4fbf\u6377\u751f\u6d3b\u3002<\/strong><\/p>\n

\u4e00\u8bf4\u8d77IGBT\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u7684\u4eba\u90fd\u4ee5\u4e3a\u4e0d\u5c31\u662f\u4e00\u4e2a\u5206\u7acb\u5668\u4ef6(Power Disceret)\u561b\uff0c\u90fd\u5f88\u77a7\u4e0d\u4e0a\u773c\u3002\u7136\u800c\u4ed6\u548c28nm\/16nm\u96c6\u6210\u7535\u8def\u5236\u9020\u4e00\u6837\uff0c\u662f\u56fd\u5bb6\u201c02\u4e13\u9879\u201d\u7684\u91cd\u70b9\u6276\u6301\u9879\u76ee\uff0c\u8fd9\u73a9\u610f\u662f\u73b0\u5728\u76ee\u524d\u529f\u7387\u7535\u5b50\u5668\u4ef6\u91cc\u6280\u672f\u6700\u5148\u8fdb\u7684\u4ea7\u54c1\uff0c\u5df2\u7ecf\u5168\u9762\u53d6\u4ee3\u4e86\u4f20\u7edf\u7684Power MOSFET\uff0c\u5176\u5e94\u7528\u975e\u5e38\u5e7f\u6cdb\uff0c\u5c0f\u5230\u5bb6\u7535\u3001\u5927\u5230\u98de\u673a\u3001\u8230\u8239\u3001\u4ea4\u901a\u3001\u7535\u7f51\u7b49\u6218\u7565\u6027\u4ea7\u4e1a\uff0c\u88ab\u79f0\u4e3a\u7535\u529b\u7535\u5b50\u884c\u4e1a\u91cc\u7684\u201cCPU\u201d\uff0c\u957f\u671f\u4ee5\u6765\uff0c\u8be5\u4ea7\u54c1\uff08\u5305\u62ec\u82af\u7247\uff09\u8fd8\u662f\u88ab\u5784\u65ad\u5728\u5c11\u6570IDM\u624b\u4e0a(FairChild\u3001Infineon\u3001TOSHIBA)\uff0c\u4f4d\u5c45\u201c\u5341\u4e8c\u4e94\u201d\u671f\u95f4\u56fd\u5bb616\u4e2a\u91cd\u5927\u6280\u672f\u7a81\u7834\u4e13\u9879\u4e2d\u7684\u7b2c\u4e8c\u4f4d\uff08\u7b80\u79f0 \u201c02\u4e13\u9879\u201d\uff09\u3002<\/strong><\/p>\n

\u3000\u3000<\/strong><\/p>\n

1\u3001\u4f55\u4e3aIGBT\uff1f<\/strong><\/p>\n

IGBT\u5168\u79f0\u4e3a\u7edd\u7f18\u6805\u53cc\u6781\u578b\u6676\u4f53\u7ba1(Insulated Gate Bipolar Transistor)\uff0c\u6240\u4ee5\u5b83\u662f\u4e00\u4e2a\u6709MOS Gate\u7684BJT\u6676\u4f53\u7ba1\u3002\u5947\u602a\u5427\uff0c\u5b83\u5230\u5e95\u662fMOSFET\u8fd8\u662fBJT\uff1f\u5176\u5b9e\u90fd\u4e0d\u662f\u53c8\u90fd\u662f\u3002\u4e0d\u7ed5\u5708\u5b50\u4e86\uff0c\u4ed6\u5c31\u662fMOSFET\u548cBJT\u7684\u7ec4\u5408\u4f53\u3002<\/strong><\/p>\n

\u6211\u5728\u524d\u9762\u8bb2MOSFET\u548cBJT\u7684\u65f6\u5019\u63d0\u5230\u8fc7\u4ed6\u4eec\u7684\u4f18\u7f3a\u70b9\uff0cMOSFET\u4e3b\u8981\u662f\u5355\u4e00\u8f7d\u6d41\u5b50(\u591a\u5b50)\u5bfc\u7535\uff0c\u800cBJT\u662f\u4e24\u79cd\u8f7d\u6d41\u5b50\u5bfc\u7535\uff0c\u6240\u4ee5BJT\u7684\u9a71 \u52a8\u7535\u6d41\u4f1a\u6bd4MOSFET\u5927\uff0c\u4f46\u662fMOSFET\u7684\u63a7\u5236\u7ea7\u6805\u6781\u662f\u9760\u573a\u6548\u5e94\u53cd\u578b\u6765\u63a7\u5236\u7684\uff0c\u6ca1\u6709\u989d\u5916\u7684\u63a7\u5236\u7aef\u529f\u7387\u635f\u8017\u3002\u6240\u4ee5IGBT\u5c31\u662f\u5229\u7528\u4e86MOSFET\u548cBJT\u7684\u4f18\u70b9\u7ec4\u5408\u8d77\u6765\u7684\uff0c\u517c\u6709MOSFET\u7684\u6805\u6781\u7535\u538b\u63a7\u5236\u6676\u4f53\u7ba1(\u9ad8\u8f93\u5165\u963b\u6297)\uff0c\u53c8\u5229\u7528\u4e86BJT\u7684\u53cc\u8f7d\u6d41\u5b50\u8fbe\u5230\u5927\u7535\u6d41(\u4f4e\u5bfc\u901a\u538b\u964d)\u7684\u76ee\u7684 (Voltage-Controlled Bipolar Device)\u3002\u4ece\u800c\u8fbe\u5230\u9a71\u52a8\u529f\u7387\u5c0f\u3001\u9971\u548c\u538b\u964d\u4f4e\u7684\u5b8c\u7f8e\u8981\u6c42\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e600V\u4ee5\u4e0a\u7684\u53d8\u6d41\u7cfb\u7edf\u5982\u4ea4\u6d41\u7535\u673a\u3001\u53d8\u9891\u5668\u3001\u5f00\u5173\u7535\u6e90\u3001\u7167\u660e\u7535\u8def\u3001\u7275\u5f15\u4f20\u52a8\u7b49\u9886\u57df\u3002<\/strong><\/p>\n

2\u3001\u4f20\u7edf\u7684\u529f\u7387MOSFET<\/strong><\/p>\n

\u4e3a\u4e86\u7b49\u4e00\u4e0b\u4fbf\u4e8e\u7406\u89e3IGBT\uff0c\u6211\u8fd8\u662f\u5148\u8bb2\u4e0bPower MOSFET\u7684\u7ed3\u6784\u3002\u6240\u8c13\u529f\u7387MOS\u5c31\u662f\u8981\u627f\u53d7\u5927\u529f\u7387\uff0c\u6362\u8a00\u4e4b\u4e5f\u5c31\u662f\u9ad8\u7535\u538b\u3001\u5927\u7535\u6d41\u3002\u6211\u4eec\u7ed3\u5408\u4e00\u822c\u7684\u4f4e\u538bMOSFET\u6765\u8bb2\u89e3\u5982\u4f55\u6539\u53d8\u7ed3\u6784\u5b9e\u73b0\u9ad8\u538b\u3001\u5927\u7535\u6d41\u3002<\/strong><\/p>\n

1)\u9ad8\u7535\u538b\uff1a\u4e00\u822c\u7684MOSFET\u5982\u679cDrain\u7684\u9ad8\u7535\u538b\uff0c\u5f88\u5bb9\u6613\u5bfc\u81f4\u5668\u4ef6\u51fb\u7a7f\uff0c\u800c\u4e00\u822c\u51fb\u7a7f\u901a\u9053\u5c31\u662f\u5668\u4ef6\u7684\u53e6\u5916\u4e09\u7aef(S\/G\/B)\uff0c\u6240\u4ee5\u8981\u89e3\u51b3\u9ad8\u538b\u95ee\u9898\u5fc5\u987b\u5835\u6b7b\u8fd9\u4e09\u7aef\u3002Gate\u7aef\u53ea\u80fd\u9760\u573a\u6c27\u57ab\u5728Gate\u4e0b\u9762\u9694\u79bb\u4e0e\u6f0f\u7684\u8ddd\u79bb(Field-Plate)\uff0c\u800cBulk\u7aef\u7684PN\u7ed3\u51fb\u7a7f\u53ea\u80fd\u9760\u964d\u4f4ePN\u7ed3\u4e24\u8fb9\u7684\u6d53\u5ea6\uff0c\u800c\u6700\u8ba8\u538c\u7684\u662f\u5230Source\u7aef\uff0c\u5b83\u5219\u9700\u8981\u4e00\u4e2a\u957f\u957f\u7684\u6f02\u79fb\u533a\u6765\u4f5c\u4e3a\u6f0f\u6781\u4e32\u8054\u7535\u963b\u5206\u538b\uff0c\u4f7f\u5f97\u7535\u538b\u90fd\u964d\u5728\u6f02\u79fb\u533a\u4e0a\u5c31\u53ef\u4ee5\u4e86\u3002<\/strong><\/p>\n

2) \u5927\u7535\u6d41\uff1a\u4e00\u822c\u7684MOSFET\u7684\u6c9f\u9053\u957f\u5ea6\u6709Poly CD\u51b3\u5b9a\uff0c\u800c\u529f\u7387MOSFET\u7684\u6c9f\u9053\u662f\u9760\u4e24\u6b21\u6269\u6563\u7684\u7ed3\u6df1\u5dee\u6765\u63a7\u5236\uff0c\u6240\u4ee5\u53ea\u8981process\u7a33\u5b9a\u5c31\u53ef\u4ee5\u505a\u7684\u5f88\u5c0f\uff0c\u800c\u4e14\u4e0d\u53d7\u5149\u523b\u7cbe\u5ea6\u7684\u9650\u5236\u3002\u800c\u5668\u4ef6\u7684\u7535\u6d41\u53d6\u51b3\u4e8eW\/L\uff0c\u6240\u4ee5\u5982\u679c\u8981\u83b7\u5f97\u5927\u7535\u6d41\uff0c\u53ea\u9700\u8981\u63d0\u9ad8W\u5c31\u53ef\u4ee5\u4e86\u3002<\/strong><\/p>\n

\u6240\u4ee5\u4e0a\u9762\u7684Power MOSFET\u4e5f\u53eb\u4f5cLDMOS (Lateral Double diffusion MOS)\u3002\u867d\u7136\u8fd9\u6837\u7684\u5668\u4ef6\u80fd\u591f\u5b9e\u73b0\u5927\u529f\u7387\u8981\u6c42\uff0c\u53ef\u662f\u5b83\u4f9d\u7136\u6709\u5b83\u56fa\u6709\u7684\u7f3a\u70b9\uff0c\u7531\u4e8e\u5b83\u7684\u6e90\u3001\u6805\u3001\u6f0f\u4e09\u7aef\u90fd\u5728\u8868\u9762\uff0c\u6240\u4ee5\u6f0f\u6781\u4e0e\u6e90\u6781\u9700\u8981\u62c9\u7684\u5f88\u957f\uff0c\u592a\u6d6a\u8d39\u82af\u7247\u9762\u79ef\u3002\u800c\u4e14\u7531\u4e8e\u5668\u4ef6\u5728\u8868\u9762\u5219\u5668\u4ef6\u4e0e\u5668\u4ef6\u4e4b\u95f4\u5982\u679c\u8981\u5e76\u8054\u5219\u590d\u6742\u6027\u589e\u52a0\u800c\u4e14\u9700\u8981\u9694\u79bb\u3002\u6240\u4ee5\u540e\u6765\u53d1\u5c55\u4e86VDMOS(Vertical DMOS)\uff0c\u628a\u6f0f\u6781\u7edf\u4e00\u653e\u5230Wafer\u80cc\u9762\u53bb\u4e86\uff0c\u8fd9\u6837\u6f0f\u6781\u548c\u6e90\u6781\u7684\u6f02\u79fb\u533a\u957f\u5ea6\u5b8c\u5168\u53ef\u4ee5\u901a\u8fc7\u80cc\u9762\u51cf\u8584\u6765\u63a7\u5236\uff0c\u800c\u4e14\u8fd9\u6837\u7684\u7ed3\u6784\u66f4\u5229\u4e8e\u7ba1\u5b50\u4e4b\u95f4\u7684\u5e76\u8054\u7ed3\u6784\u5b9e\u73b0\u5927\u529f\u7387\u5316\u3002\u4f46\u662f\u5728BCD\u7684\u5de5\u827a\u4e2d\u8fd8\u662f\u7684\u5229\u7528LDMOS\u7ed3\u6784\uff0c\u4e3a\u4e86\u4e0eCMOS\u517c\u5bb9\u3002<\/strong><\/p>\n

\u518d\u7ed9\u5927\u5bb6\u8bb2\u4e00\u4e0bVDMOS\u7684\u53d1\u5c55\u53ca\u6f14\u53d8\u5427\uff0c\u6700\u65e9\u7684VDMOS\u5c31\u662f\u76f4\u63a5\u628aLDMOS\u7684Drain\u653e\u5230\u4e86\u80cc\u9762\u901a\u8fc7\u80cc\u9762\u51cf\u8584\u3001Implant\u3001\u91d1\u5c5e\u84b8\u53d1\u5236\u4f5c\u51fa\u6765\u7684(\u5982\u4e0b\u56fe)\uff0c\u4ed6\u5c31\u662f\u4f20\u8bf4\u4e2d\u7684Planar VDMOS\uff0c\u5b83\u548c\u4f20\u7edf\u7684LDMOS\u6bd4\u6311\u6218\u5728\u4e8e\u80cc\u9762\u5de5\u827a\u3002\u4f46\u662f\u5b83\u7684\u597d\u5904\u662f\u6b63\u9762\u7684\u5de5\u827a\u4e0e\u4f20\u7edfCMOS\u5de5\u827a\u517c\u5bb9\uff0c\u6240\u4ee5\u5b83\u8fd8\u662f\u6709\u751f\u547d\u529b\u7684\u3002\u4f46\u662f\u8fd9\u79cd\u7ed3\u6784\u7684\u7f3a\u70b9\u5728\u4e8e\u5b83\u6c9f\u9053\u662f\u6a2a\u5728\u8868\u9762\u7684\uff0c\u9762\u79ef\u5229\u7528\u7387\u8fd8\u662f\u4e0d\u591f\u9ad8\u3002<\/strong><\/p>\n

\u518d\u540e\u6765\u4e3a\u4e86\u514b\u670dPlanar DMOS\u5e26\u6765\u7684\u7f3a\u70b9\uff0c\u6240\u4ee5\u53d1\u5c55\u4e86VMOS\u548cUMOS\u7ed3\u6784\u3002\u4ed6\u4eec\u7684\u505a\u6cd5\u662f\u5728Wafer\u8868\u9762\u6316\u4e00\u4e2a\u69fd\uff0c\u628a\u7ba1\u5b50\u7684\u6c9f\u9053\u4ece\u539f\u6765\u7684Planar\u53d8\u6210\u4e86\u6cbf\u7740\u69fd\u58c1\u7684 vertical\uff0c\u679c\u7136\u662f\u4e2a\u806a\u660e\u7684\u60f3\u6cd5\u3002\u4f46\u662f\u4e00\u4e2a\u9985\u997c\u603b\u662f\u4f1a\u642d\u914d\u4e00\u4e2a\u9677\u9631(IC\u5236\u9020\u603b\u662f\u5728\u4e0d\u65adtrade-off)\uff0c\u8fd9\u6837\u7684\u7ed3\u6784\u5929\u751f\u7684\u7f3a\u70b9\u662f\u69fd\u592a\u6df1\u5bb9\u6613\u7535 \u573a\u96c6\u4e2d\u800c\u5bfc\u81f4\u51fb\u7a7f\uff0c\u800c\u4e14\u5de5\u827a\u96be\u5ea6\u548c\u6210\u672c\u90fd\u5f88\u9ad8\uff0c\u4e14\u69fd\u7684\u5e95\u90e8\u5fc5\u987b\u7edd\u5bf9rouding\uff0c\u5426\u5219\u5f88\u5bb9\u6613\u51fb\u7a7f\u6216\u8005\u4ea7\u751f\u5e94\u529b\u7684\u6676\u683c\u7f3a\u9677\u3002\u4f46\u662f\u5b83\u7684\u4f18\u70b9\u662f\u6676\u9971\u6570\u91cf\u6bd4\u539f\u6765\u591a\u5f88\u591a\uff0c\u6240\u4ee5\u53ef\u4ee5\u5b9e\u73b0\u66f4\u591a\u7684\u6676\u4f53\u7ba1\u5e76\u8054\uff0c\u6bd4\u8f83\u9002\u5408\u4f4e\u7535\u538b\u5927\u7535\u6d41\u7684application\u3002<\/strong><\/p>\n

\u8fd8\u6709\u4e00\u4e2a\u7ecf\u5178\u7684\u4e1c\u897f\u53eb\u505aCoolMOS\uff0c\u5927\u5bb6\u81ea\u5df1google\u5b66\u4e60\u5427\u3002\u4ed6\u5e94\u8be5\u7b97\u662fPower MOS\u6491\u7535\u538b\u6700\u9ad8\u7684\u4e86\uff0c\u53ef\u4ee5\u52301000V\u3002<\/strong><\/p>\n

3\u3001IGBT\u7684\u7ed3\u6784\u548c\u539f\u7406<\/strong><\/p>\n

\u4e0a\u9762\u4ecb\u7ecd\u4e86Power MOSFET\uff0c\u800cIGBT\u5176\u5b9e\u672c\u8d28\u4e0a\u8fd8\u662f\u4e00\u4e2a\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff0c\u4ece\u7ed3\u6784\u4e0a\u770b\u548cPower MOSFET\u975e\u5e38\u63a5\u8fd1\uff0c\u5c31\u5728\u80cc\u9762\u7684\u6f0f\u7535\u6781\u589e\u52a0\u4e86\u4e00\u4e2aP+\u5c42\uff0c\u6211\u4eec\u79f0\u4e4b\u4e3aInjection Layer (\u540d\u5b57\u7684\u7531\u6765\u7b49\u4e0b\u8bf4).\u3002\u5728\u4e0a\u9762\u4ecb\u7ecd\u7684Power MOSFET\u5176\u5b9e\u6839\u672c\u4e0a\u6765\u8bb2\u5b83\u8fd8\u662f\u4f20\u7edf\u7684MOSFET\uff0c\u5b83\u4f9d\u7136\u662f\u5355\u4e00\u8f7d\u6d41\u5b50(\u591a\u5b50)\u5bfc\u7535\uff0c\u6240\u4ee5\u6211\u4eec\u8fd8\u6ca1\u6709\u53d1\u6325\u51fa\u5b83\u7684\u6781\u81f4\u6027\u80fd\u3002\u6240\u4ee5\u540e\u6765\u53d1\u5c55\u51fa\u4e00\u4e2a\u65b0\u7684\u7ed3 \u6784\uff0c\u6211\u4eec\u5982\u4f55\u80fd\u591f\u5728Power MOSFET\u5bfc\u901a\u7684\u65f6\u5019\u9664\u4e86MOSFET\u81ea\u5df1\u7684\u7535\u5b50\u6211\u8fd8\u80fd\u4ece\u6f0f\u7aef\u6ce8\u5165\u7a7a\u7a74\u4e0d\u5c31\u53ef\u4ee5\u4e86\u5417\uff1f\u6240\u4ee5\u81ea\u7136\u7684\u5c31\u5728\u6f0f\u7aef\u5f15\u5165\u4e86\u4e00\u4e2aP+\u7684injection layer (\u8fd9\u5c31\u662f\u540d\u5b57\u7684\u7531\u6765)\uff0c\u800c\u4ece\u7ed3\u6784\u4e0a\u6f0f\u7aef\u5c31\u591a\u4e86\u4e00\u4e2aP+\/N-drift\u7684PN\u7ed3\uff0c\u4e0d\u8fc7\u4ed6\u662f\u6b63\u504f\u7684\uff0c\u6240\u4ee5\u5b83\u4e0d\u5f71\u54cd\u5bfc\u901a\u53cd\u800c\u589e\u52a0\u4e86\u7a7a\u7a74\u6ce8\u5165\u6548\u5e94\uff0c\u6240\u4ee5\u5b83\u7684\u7279\u6027\u5c31\u7c7b\u4f3cBJT\u4e86\u6709\u4e24\u79cd\u8f7d\u6d41\u5b50\u53c2\u4e0e\u5bfc\u7535\u3002\u6240\u4ee5\u539f\u6765\u7684source\u5c31\u53d8\u6210\u4e86Emitter\uff0c\u800cDrain\u5c31\u53d8\u6210\u4e86Collector\u4e86\u3002<\/strong><\/p>\n

\u4ece\u4e0a\u9762\u7ed3\u6784\u4ee5\u53ca\u53f3\u8fb9\u7684\u7b49\u6548\u7535\u8def\u56fe\u770b\u51fa\uff0c\u5b83\u6709\u4e24\u4e2a\u7b49\u6548\u7684BJT\u80cc\u9760\u80cc\u94fe\u63a5\u8d77\u6765\u7684\uff0c\u5b83\u5176\u5b9e\u5c31\u662fPNPN\u7684Thyristor(\u6676\u95f8\u7ba1)\uff0c\u8fd9\u4e2a\u4e1c\u897f\u4e0d\u662f\u6211\u4eec\u523b\u610f\u505a\u7684\uff0c\u800c\u662f\u7ed3\u6784\u751f\u6210\u7684\u3002\u6211\u57285\u4e2a\u6708\u524d\u6709\u7bc7\u6587\u7ae0\u8bb2Latch-up(http:\/\/ic-garden.cn\/?p=511)\u5c31\u8bf4\u4e86\uff0c\u8fd9\u6837\u7684\u7ed3\u6784\u6700\u8981\u547d\u7684\u4e1c\u897f\u5c31\u662f\u6813\u9501(Latch-up)\u3002\u800c\u63a7\u5236Latch-up\u7684\u5173\u952e\u5c31\u5728\u4e8e\u63a7\u5236Rs\uff0c\u53ea\u8981\u6ee1\u8db3\u03b11+\u03b12<1\u5c31\u53ef\u4ee5\u4e86\u3002<\/strong><\/p>\n

\u53e6\u5916\uff0c\u8fd9\u6837\u7684\u7ed3\u6784\u597d\u5904\u662f\u63d0\u9ad8\u4e86\u7535\u6d41\u9a71\u52a8\u80fd\u529b\uff0c\u4f46\u574f\u5904\u662f\u5f53\u5668\u4ef6\u5173\u65ad\u65f6\uff0c\u6c9f\u9053\u5f88\u5feb\u5173\u65ad\u6ca1\u6709\u4e86\u591a\u5b50\u7535\u6d41\uff0c\u53ef\u662fCollector (Drain)\u7aef\u8fd9\u8fb9\u8fd8\u7ee7\u7eed\u6709\u5c11\u5b50\u7a7a\u7a74\u6ce8\u5165\uff0c\u6240\u4ee5\u6574\u4e2a\u5668\u4ef6\u7684\u7535\u6d41\u9700\u8981\u6162\u6162\u624d\u80fd\u5173\u95ed(\u62d6\u5c3e\u7535\u6d41, tailing current)\uff0c\u5f71\u54cd\u4e86\u5668\u4ef6\u7684\u5173\u65ad\u65f6\u95f4\u53ca\u5de5\u4f5c\u9891\u7387\u3002\u8fd9\u4e2a\u53ef\u662f\u5f00\u5173\u5668\u4ef6\u7684\u5927\u5fcc\u554a\uff0c\u6240\u4ee5\u53c8\u5f15\u5165\u4e86\u4e00\u4e2a\u7ed3\u6784\u5728P+\u4e0eN-drift\u4e4b\u95f4\u52a0\u5165N+buffer\u5c42\uff0c\u8fd9\u4e00\u5c42\u7684\u4f5c\u7528\u5c31\u662f\u8ba9\u5668\u4ef6\u5728\u5173\u65ad\u7684\u65f6\u5019\uff0c\u4eceCollector\u7aef\u6ce8\u5165\u7684\u7a7a\u7a74\u8fc5\u901f\u5728N+ buffer\u5c42\u5c31\u88ab\u590d\u5408\u6389\u63d0\u9ad8\u5173\u65ad\u9891\u7387\uff0c\u6211\u4eec\u79f0\u8fd9\u79cd\u7ed3\u6784\u4e3aPT-IGBT (Punch Through\u578b)\uff0c\u800c\u539f\u6765\u6ca1\u6709\u5e26N+buffer\u7684\u5219\u4e3aNPT-IGBT\u3002<\/strong><\/p>\n

\u4e00\u822c\u60c5\u51b5\u4e0b\uff0cNPT-IGBT\u6bd4PT-IGBT\u7684Vce(sat)\u9ad8\uff0c\u4e3b\u8981\u56e0\u4e3aNPT\u662f\u6b63\u6e29\u5ea6\u7cfb\u6570(P+\u886c\u5e95\u8f83\u8584\u7a7a\u7a74\u6ce8\u5165\u8f83\u5c11)\uff0c\u800cPT\u662f\u8d1f\u6e29\u5ea6\u7cfb\u6570(\u7531\u4e8eP\u886c\u5e95\u8f83\u539a\u6240\u4ee5\u7a7a\u7a74\u6ce8\u5165\u8f83\u591a\u800c\u5bfc\u81f4\u7684\u4e09\u6781\u7ba1\u57fa\u533a\u8c03\u5236\u6548\u5e94\u660e\u663e)\uff0c\u800cVce(sat)\u51b3\u5b9a\u4e86\u5f00\u5173\u635f\u8017(switch loss)\uff0c\u6240\u4ee5\u5982\u679c\u9700\u8981\u540c\u6837\u7684Vce(sat)\uff0c\u5219NPT\u5fc5\u987b\u8981\u589e\u52a0drift\u539a\u5ea6\uff0c\u6240\u4ee5Ron\u5c31\u589e\u5927\u4e86\u3002<\/strong><\/p>\n

4\u3001IGBT\u7684\u5236\u9020\u5de5\u827a\uff1a
\n<\/strong><\/p>\n


\n<\/strong><\/p>\n

IGBT\u7684\u5236\u7a0b\u6b63\u9762\u548c\u6807\u51c6BCD\u7684LDMOS\u6ca1\u5dee\uff0c\u53ea\u662f\u80cc\u9762\u6bd4\u8f83\u96be\u641e\uff1a<\/strong><\/p>\n

1) \u80cc\u9762\u51cf\u8584\uff1a\u4e00\u822c\u8981\u6c426~8mil\uff0c\u8fd9\u4e2a\u539a\u5ea6\u5f88\u96be\u78e8\u4e86\uff0c\u5bb9\u6613\u788e\u7247\u3002<\/strong><\/p>\n

2) \u80cc\u9762\u6ce8\u5165\uff1a\u90fd\u78e8\u52306~8mil\u4e86\uff0c\u8fd8\u8981\u6253High current P+ implant >E14\u7684dose\uff0c\u5f88\u5bb9\u6613\u788e\u7247\u7684\uff0c\u5fc5\u987b\u6709\u4e13\u95e8\u7684\u8bbe\u5907dedicate\u3002\u751a\u81f3\u7b2c\u56db\u4ee3\u6709\u4e24\u6b21Hi-current\u6ce8\u5165\uff0c\u66f4\u662f\u6311\u6218\u6781\u9650\u4e86\u3002<\/strong><\/p>\n

3) \u80cc\u9762\u6e05\u6d17\uff1a\u8fd9\u4e2a\u4e00\u822c\u7684SEZ\u5c31\u53ef\u4ee5\u3002<\/strong><\/p>\n

4) \u80cc\u9762\u91d1\u5c5e\u5316\uff1a\u8fd9\u4e2a\u53ea\u80fd\u7528\u91d1\u5c5e\u84b8\u53d1\u5de5\u827a\uff0cTi\/Ni\/Ag\u6807\u51c6\u5de5\u827a\u3002<\/strong><\/p>\n

5) \u80cc\u9762Alloy\uff1a\u4e3b\u8981\u8003\u8651wafer\u592a\u8584\u4e86\uff0c\u5bb9\u6613\u7fd8\u66f2\u788e\u7247\u3002<\/strong><\/p>\n

5\u3001IGBT\u7684\u65b0\u6280\u672f\uff1a<\/strong><\/p>\n

1) \u573a\u622a\u6b62FS-IGBT\uff1a\u4e0d\u7ba1PT\u8fd8\u662fNPT\u7ed3 \u6784\u90fd\u4e0d\u80fd\u6700\u7ec8\u6ee1\u8db3\u65e0\u9650high power\u7684\u8981\u6c42\uff0c\u8981\u505a\u5230high power\uff0c\u5c31\u5fc5\u987b\u8981\u964d\u4f4eVce(sat)\uff0c\u4e5f\u5c31\u662f\u964d\u4f4eRon\u3002\u6240\u4ee5\u5fc5\u987b\u8981\u964d\u4f4eN-drift\u539a\u5ea6\uff0c\u53ef\u662f\u8fd9\u4e2aN-drift\u539a\u5ea6\u53c8\u53d7\u5230\u622a\u6b62\u72b6\u6001\u7684\u7535\u573a\u7ea6\u675f (\u592a\u8584\u4e86\u5bb9\u6613channel\u7a7f\u901a)\u3002\u6240\u4ee5\u5982\u679c\u8981\u5411\u964d\u4f4edrift\u539a\u5ea6\uff0c\u5fc5\u987b\u8981\u8ba9\u622a\u6b62\u7535\u573a\u5230\u6c9f\u9053\u524d\u63d0\u524d\u964d\u4e0b\u6765\u3002\u6240\u4ee5\u9700\u8981\u5728P+ injection layer\u4e0eN-drift\u4e4b\u95f4\u5f15\u5165\u4e00\u4e2aN+\u573a\u622a\u6b62\u5c42(Field Stop, FS)\uff0c\u5f53IGBT\u5904\u4e8e\u5173\u95ed\u72b6\u6001\uff0c\u7535\u573a\u5728\u622a\u6b62\u5c42\u5185\u8fc5\u901f\u964d\u4f4e\u52300\uff0c\u8fbe\u5230\u7ec8\u6b62\u7684\u76ee\u7684\uff0c\u6240\u4ee5\u6211\u4eec\u5c31\u53ef\u4ee5\u8fdb\u4e00\u6b65\u964d\u4f4eN-drift\u539a\u5ea6\u8fbe\u5230\u964d\u4f4eRon\u548cVce\u4e86\u3002\u800c\u4e14\u8fd9\u4e2a\u7ed3\u6784\u548cN+ buffer\u7ed3\u6784\u975e\u5e38\u7c7b\u4f3c\uff0c\u6240\u4ee5\u5b83\u4e5f\u6709PT-IGBT\u7684\u6548\u679c\u6291\u5236\u5173\u95ed\u72b6\u6001\u4e0b\u7684tailing\u7535\u6d41\u63d0\u9ad8\u5173\u95ed\u901f\u5ea6\u3002<\/strong><\/p>\n

\u95ee\u9898\u6765\u4e86\uff0c\u8fd9\u548cPT-IGBT\u7684N+ buffer\u5dee\u5728\u54ea\u91cc\uff1f\u5176\u5b9e\u4e4b\u5236\u4f5c\u5de5\u827a\u4e0d\u4e00\u6837\u3002PT-IGBT\u662f\u7528\u4e24\u5c42EPI\u505a\u51fa\u6765\u7684\uff0c\u5b83\u662f\u5728P+ \u886c\u5e95\u4e0a\u957f\u7b2c\u4e00\u5c42~10um\u7684N+ buffer\uff0c\u7136\u540e\u518d\u957f\u7b2c\u4e8c\u5c42~100um\u7684N-Drift\u3002\u8fd9\u4e2acost\u5f88\u9ad8\u554a\uff01\u800c\u76f8\u6bd4\u4e4b\u4e0b\u7684FS-IGBT\u5462\uff0c\u662f\u5728NPT-IGBT\u7684\u57fa\u7840\u4e0a\u76f4\u63a5\u80cc\u9762 \u6253\u5165\u9ad8\u6d53\u5ea6\u7684N+\u622a\u6b62\u5c42\u5c31\u597d\u4e86\uff0c\u6210\u672c\u6bd4\u8f83\u4f4e\uff0c\u4f46\u662f\u6311\u6218\u662f\u66f4\u8584\u7684\u539a\u5ea6\u4e0b\u5982\u4f55\u5b9e\u73b0\u4e0d\u788e\u7247\u3002
\n<\/strong><\/p>\n

2) \u9633\u6781\u77ed\u63a5(SA: Shorted-Anode)\uff1a\u5b83 \u7684\u7ed3\u6784\u662fN+\u96c6\u7535\u6781\u95f4\u6b47\u63d2\u5165P+\u96c6\u7535\u6781\uff0c\u8fd9\u6837N+\u96c6\u7535\u6781\u76f4\u63a5\u63a5\u89e6\u573a\u622a\u6b62\u5c42\u5e76\u7528\u4f5cPN\u4e8c\u6781\u7ba1\u7684\u9634\u6781\uff0c\u800cP+\u8fd8\u7ee7\u7eed\u505a\u5b83\u7684FS-IGBT\u7684\u96c6\u7535\u6781\uff0c\u5b83\u5177\u6709\u589e\u5f3a\u7684\u7535\u6d41\u7279\u6027\u4e14\u6539\u53d8\u4e86\u6210\u672c\u7ed3\u6784\uff0c\u56e0\u4e3a\u4e0d\u9700\u8981\u5171\u5c01\u88c5\u53cd\u5e76\u8054\u4e8c\u6781\u7ba1\u4e86\u3002\u5b9e\u9a8c\u8bc1\u660e\uff0c\u5b83\u53ef\u4ee5\u63d0\u9ad8\u9971\u548c\u7535\u6d41\uff0c\u964d\u4f4e\u9971\u548c\u538b\u964d(~12%)\u3002<\/strong><\/p>\n

6\u3001IGBT\u7684\u4e3b\u8981I-V\u7279\u6027\uff1a<\/strong><\/p>\n

IGBT\u4f60\u65e2\u53ef\u4ee5\u628a\u5b83\u5f53\u505a\u4e00\u4e2aMOSFET\u4e0ePiN\u4e8c\u6781\u7ba1\u4e32\u8054\uff0c\u4e5f\u53ef\u4ee5\u5f53\u505a\u662f\u4e00\u4e2a\u5bbd\u57fa\u533a\u7684PNP\u88abMOSFET\u9a71\u52a8(Darlington\u7ed3\u6784)\uff0c \u524d\u8005\u53ef\u4ee5\u7528\u6765\u7406\u89e3\u5b83\u7684\u7279\u6027\uff0c\u540e\u8005\u624d\u662f\u4ed6\u7684\u539f\u7406\u3002\u5b83\u770b\u8d77\u6765\u5c31\u662f\u4e00\u4e2aMOSFET\u7684I-V\u66f2\u7ebf\u5f80\u540e\u632a\u4e86\u4e00\u6bb5(>0.7V)\uff0c\u56e0\u4e3a\u6c9f\u9053\u5f00\u542f\u4ea7\u751f\u7535\u6d41\u5fc5\u987b\u6ee1\u8db3\u6f02\u79fb\u533a\u7535\u6d41\u4e0e\u6f02\u79fb\u533a\u7535\u963b\u4e58\u79ef\u8d85\u8fc70.7V\uff0c\u624d\u80fd\u4f7f\u5f97P+\u886c\u5e95\u4e0eN-drift\u7684PN\u7ed3\u6b63\u5411\u5bfc\u901a\uff0c\u8fd9\u6837\u624d\u53ef\u4ee5work\uff0c\u5426\u5219\u6c9f\u9053\u5f00\u542f\u4e5f\u4e0d\u80fdwork\u7684\u3002<\/p>\n

\u6700\u540e\u7ed9\u5927\u5bb6\u5439\u5439\u725b\u5427\uff0c\u5927\u5bb6\u7ecf\u5e38\u4f1a\u542c\u5230\u7b2c\u4e00\u4ee3IGBT\u4e00\u76f4\u5230\u7b2c\u516d\u4ee3IGBT\uff0c\u8fd9\u4e9b\u662f\u4ec0\u4e48\u610f\u601d\u5462\uff1f<\/p>\n

1) \u7b2c\u4e00\u4ee3\uff1a<\/strong>\u4ed6\u5c31\u662fIGBT\u7684\u96cf\u5f62\uff0c\u6700\u7b80\u5355\u7684\u539f\u7406\u7ed3\u6784\u56fe\u90a3\u79cd\uff0c\u6240\u4ee5\u4ed6\u5fc5\u987b\u8981\u63d0\u9ad8N-drift\u6765\u63d0\u9ad8\u8010\u538b\uff0c\u6240\u4ee5\u5bfc\u901a\u7535\u963b\u548c\u5173\u65ad\u529f\u8017\u90fd\u6bd4\u8f83\u9ad8\uff0c\u6240\u4ee5\u6ca1\u6709\u666e\u53ca\u4f7f\u7528\u3002<\/p>\n

2) \u7b2c\u4e8c\u4ee3\uff1a<\/strong>PT-IGBT\uff0c\u7531\u4e8e\u8017\u5c3d\u5c42\u4e0d\u80fd\u7a7f\u900fN+\u7f13\u51b2\u5c42\uff0c\u6240\u4ee5\u57fa\u533a\u7535\u573a\u52a0\u5f3a\u5448\u68af\u5f62\u5206\u5e03\uff0c\u6240\u4ee5\u53ef\u4ee5\u51cf\u5c0f\u82af\u7247\u539a\u5ea6\u4ece\u800c\u51cf\u5c0f\u529f\u8017\u3002\u8fd9\u4e3b\u8981\u662f\u897f\u95e8\u5b50\u516c\u53f81990~1995\u5e74\u7684\u4ea7\u54c1BSM150GB120DN1(“DN1″\u5c31\u662f\u7b2c\u4e00\u4ee3\u7684\u610f\u601d)\u3002\u5b83\u4e3b\u8981\u5728600V\u4e0a\u6709\u4f18\u52bf(\u7c7b\u4f3cGTR\u7279\u6027)\uff0c\u52301200V\u7684\u65f6\u5019\u9047\u5230\u5916\u5ef6\u539a\u5ea6\u5927\u6210\u672c\u9ad8\u3001\u4e14\u53ef\u9760\u6027\u4f4e\u7684\u95ee\u9898(\u63ba\u6742\u6d53\u5ea6\u4ee5\u53ca\u539a\u5ea6\u7684\u5747\u5300\u6027\u5dee)\u3002<\/p>\n

3)\u7b2c\u4e09\u4ee3\uff1a<\/strong>NPT-IGBT\uff0c\u4e0d\u518d\u91c7\u7528\u5916\u5ef6\u6280\u672f\uff0c\u800c\u662f\u91c7\u7528\u79bb\u5b50\u6ce8\u5165\u7684\u6280\u672f\u6765\u751f\u6210P+\u96c6\u7535\u6781(\u900f\u660e\u96c6\u7535\u6781\u6280\u672f)\uff0c\u53ef\u4ee5\u7cbe\u51c6\u7684\u63a7\u5236\u7ed3\u6df1\u800c\u63a7\u5236\u53d1\u5c04\u6548\u7387\u5c3d\u53ef\u80fd\u4f4e\uff0c\u589e\u5feb\u8f7d\u6d41\u5b50\u62bd\u53d6\u901f\u5ea6\u6765\u964d\u4f4e\u5173\u65ad\u635f\u8017\uff0c\u53ef\u4ee5\u4fdd\u6301\u57fa\u533a\u539f\u6709\u7684\u8f7d\u6d41\u5b50\u5bff\u547d\u800c\u4e0d\u4f1a\u5f71\u54cd\u7a33\u6001\u529f\u8017\uff0c\u540c\u65f6\u5177\u6709\u6b63\u6e29\u5ea6\u7cfb\u6570\u7279\u70b9\uff0c\u6240\u4ee5\u6280\u672f\u6bd4\u8f83\u6210\u719f\u5728\u7a33\u6001\u635f\u8017\u548c\u5173\u65ad\u635f\u8017\u95f4\u53d6\u5f97\u4e86\u5f88\u597d\u7684\u6298\u4e2d\uff0c\u6240\u4ee5\u88ab\u5e7f\u6cdb\u91c7\u7528\u3002\u4ee3\u8868\u516c\u53f8\u4f9d\u7136\u662f\u897f\u95e8\u5b50\u516c\u53f8\u7387\u5148\u91c7\u7528FZ(\u533a\u7194\u6cd5)\u4ee3\u66ff\u5916\u5ef6\u7684\u6279\u91cf\u4ea7\u54c1\uff0c\u4ee3\u8868\u4ea7\u54c1BSM200GB120DN2\uff0cVCE>1200V, Vce(sat)=2.1V\u3002<\/p>\n

4)\u7b2c\u56db\u4ee3\uff1a<\/strong>Trench-IGBT\uff0c\u6700\u5927\u7684\u6539\u8fdb\u662f\u91c7\u7528Trench\u7ed3\u6784\uff0c\u662f\u7684\u6c9f\u9053\u4ece\u8868\u9762\u8dd1\u5230\u4e86\u5782\u76f4\u9762\u4e0a\uff0c\u6240\u4ee5\u57fa\u533a\u7684PIN\u6548\u5e94\u589e\u5f3a\uff0c\u6805\u6781\u9644\u8fd1\u8f7d\u6d41\u5b50\u6d53\u5ea6\u589e\u5927\uff0c\u4ece\u800c\u63d0\u9ad8\u4e86\u7535\u5bfc\u8c03\u5236\u6548\u5e94\u51cf\u5c0f\u4e86\u5bfc\u901a\u7535\u963b\uff0c\u540c\u65f6\u7531\u4e8e\u6c9f\u9053\u4e0d\u5728\u8868\u9762\uff0c\u6240\u4ee5\u6d88\u9664\u4e86JFET\u6548\u5e94\uff0c\u6240\u4ee5\u6805\u6781\u5bc6\u5ea6\u589e\u52a0\u4e0d\u53d7\u9650\u5236\uff0c\u800c\u4e14\u5728\u7b2c\u56db\u4ee3IGBT\u7ee7\u7eed\u6cbf\u7528\u4e86\u7b2c\u4e09\u4ee3\u7684\u96c6\u7535\u6781P+implant\u6280\u672f\u540c\u65f6\u52a0\u5165\u4e86\u7b2c\u4e8c\u4ee3\u7684PT\u6280\u672f\u4f5c\u4e3a\u573a\u7ec8\u6b62\u5c42\uff0c\u6709\u6548\u7279\u9ad8\u8010\u538b\u80fd\u529b\u7b49\u3002\u9700\u8981\u4f7f\u7528\u53cc\u6ce8\u5165\u6280\u672f\uff0c\u96be\u5ea6\u8f83\u5927\u3002\u8fd9\u4e2a\u65f6\u5019\u662f\u82f1\u98de\u51cc\u7684\u65f6\u4ee3 \u4e86\uff0cInfineon\u7684\u51cf\u8584\u6280\u672f\u4e16\u754c\u7b2c\u4e00\uff0c\u5b83\u7684\u539a\u5ea6\u57281200V\u7684\u65f6\u5019\u53ef\u4ee5\u964d\u4f4e\u5230120um~140um(NPT-IGBT\u9700\u8981200um)\uff0c\u751a\u81f3\u5728600V\u53ef\u4ee5\u964d\u4f4e\u523070um\u3002<\/p>\n

5)\u7b2c\u4e94\u4ee3\uff1a<\/strong>FS-IGBT\u548c\u7b2c\u516d\u4ee3\u7684FS-Trench\uff0c\u7b2c\u4e94\u3001\u7b2c\u516d\u4ee3\u4ea7\u54c1\u662f\u5728IGBT\u7ecf\u5386\u4e86\u4e0a\u8ff0\u56db\u6b21\u6280\u672f\u6539\u8fdb\u5b9e\u8df5\u540e\u5bf9\u5404\u79cd\u6280\u672f\u63aa\u65bd\u7684\u91cd\u65b0\u7ec4\u5408\u3002\u7b2c\u4e94\u4ee3IGBT\u662f\u7b2c\u56db\u4ee3\u4ea7\u54c1&ldquo;\u900f\u660e\u96c6\u7535\u533a\u6280\u672f&rdquo;\u4e0e&ldquo;\u7535\u573a\u4e2d\u6b62\u6280\u672f&rdquo;\u7684\u7ec4\u5408\u3002\u7b2c\u516d\u4ee3\u4ea7\u54c1\u662f\u5728\u7b2c\u4e94\u4ee3\u57fa\u7840\u4e0a\u6539\u8fdb\u4e86\u6c9f\u69fd\u6805\u7ed3\u6784\uff0c\u5e76\u4ee5\u65b0\u7684\u9762\u8c8c\u51fa\u73b0\u3002<\/p>\n

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\u91d1\u7530\u94dc\u4e1a\u751f\u4ea7C1100\u94dc\u5e26<\/a>\u3001C1020\u94dc\u5e26\u3001C1220\u94dc\u5e26\u3001T2\u94dc\u6392\u3001TMY\u94dc\u6392<\/a>\u7b49\uff0c\u6b22\u8fce\u6765\u7535\u54a8\u8be2\uff0c\u8054\u7cfb\u7535\u8bdd\uff1a0574-83005999\u3002<\/p>\n

\"\"<\/p>\n","protected":false},"excerpt":{"rendered":"

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